SAW Grade LiTaO3(LT) Wafer
Lithium Tantalate is one of the most versatile materials. LiTaO3 has numerous applications including electro-optical modulators, pyroelectric detectors, optical waveguide and SAW substrates and piezoelectric transducers due to unique electro-optical, pyroelectric, piezoelectric and acoustic properties, a wide transparency range, and a high optical damage threshold combined with good chemical and mechanical stability.
Specifications
Material | SAW Grade LiTaO3 crystal | |
Curie Temp | 603±2℃ | |
Cutting Angle | X/X112Y/Y36/Y42/Y48 etc | |
Diameter/size | 3”/4”/6″ | |
Tol(±) | <0.20 mm | |
Thickness | 0.18 ~ 0.5mm or more | |
Primary Flat | 22mm /32mm /42.5mm | |
LTV (5mmx5mm) | <1µm | |
TTV | <3µm | |
Bow | -30<bow<30 | |
Warp | <40µm | |
PLTV(<0.5um) | ≥95%(5mm*5mm) | |
Orientation Flat | All available | |
Surface Type | Single Side Polished /Double Sides Polished | |
Polished side Ra | <0.5nm | |
Back Side Criteria | General is 0.2-0.5µm or as customized | |
Edge Criteria | R=0.2mm or Bullnose | |
Wafer Surface Criteria | Transmissivity | general:5.9×10-11<s<2.0*10-10 at 25℃ |
Contamination, | None | |
Particles ￠>0.3 µ m | <= 30 | |
Scratch , Chipping | None | |
Defect | No edge cracks, scratches, saw marks, stains | |
Packaging | Qty/Wafer box | 25pcs per box |